Flowmeter with Bellows Needle Valve (for Low-leak Flow Measurement and Control)
MODEL Rk1500 SERIES
The Model RK1500 Series Flowmeter is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature and toxic gases.
Features
1.High reliability against leak is ensured because 100% leak test is conducted before shipping, using a helium leak detector.
2.Bellows seal type needle valve perfectly eliminates leak from the valve stem.
3.Superior corrosion resistance is ensured by using SUS 316,FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other
fluids.
4.Superior corrosion resistance is ensured by using SUS 316,FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other
fluids.
Applications
1.For vacuum systems
2.For semiconductor manufacturing lines
Standard Spesifications
|
|
Gases |
Liquids |
|
Fluids |
Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas) |
Standard fluid: Water For other liquids, consultation is necessary regarding whether |
|
Flow range |
0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.) |
0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.) |
|
Accuracy
|
FS±2% (Measurement point) |
FS±2% (Measurement point) |
|
Proof pressure |
1.0 MPa for 100 ML/MIN or less |
1.0 MPa for 5 ML/MIN or less |
|
Available scale |
10:1 * Optional: 20:1 |
|
|
Materials |
SS |
|
Body block |
SUS316 |
|
Tapered tube |
Pyrex®, glass |
|
Packing |
FKM, fluorocarbon resin |
|
Float |
Pyrex, SUS 316, glass |
|
Protective cover |
Acrylic resin |
|
Temperature resistance |
MAX60℃ |