Compact Handy Mass Flow Control/Measurement Unit
FLOW COMPO
This is a compact handy flow control/measuring unit made by combining a compact DIN72 x72 power indicator [CR-400] and MFC/MFM.
Features
- Compact, lightweight integral unit
- The touch panel type permits easy FS scaling, flow setting, and valve opening/closing.
- Free selection of joints ranging from one-touch type to Swage-lock.
- The MFC-equipped type (FCC Series) can be used as MFM by pressing the OPEN switch.
- Please contact us for the metal seal specifications for corrosive gas.
Standard Spesification
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MODEL |
FCC-3000-G1 |
FCC-3000-G2 |
FCM-3000-G1 |
FCM-3000-G2 |
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Mounting MFC/MFM |
3660 (MFC) |
3200 (MFC) |
3760 (MFM) |
3100 (MFM) |
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Standard flow range |
10SCCM-20SLM |
1SCCM-20SLM |
10SCCM-20SLM |
1SCCM-20SLM |
|
Sealing material |
FKM (option CR or NBR) |
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Response |
Within 2 sec. (F.S. ±2%) |
Within 1 sec. (F.S. ±2%) Within 2 sec. |
Within 1 sec. |
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Joint |
Various joints are applicable. |
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