Standard Mass Flow Meter
MODEL 3760 SERIES
The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.
Features
- Improved constant-current temperature difference detection type flow sensor for quick response
- The compact body permits installation at any location.
Standard Spesifications
|
Model |
3760 |
3765 |
|
Sensor |
Thermal mass flow sensor |
|
|
Response |
2 sec. or less |
3 sec. or less |
|
Accuracy |
±1.0%F.S. (25℃) |
±1.5%F.S. (25℃) |
|
Temperature coefficient |
±0.1 F.S./℃ (15–35℃) |
±0.2 F.S./℃ (15–35℃) |
|
Repeatability |
±0.5%F.S. (20℃) |
|
|
Proof pressure |
980kPa (G) |
|
|
Leak rate |
1 × 10-8 Pa·m3/s or less (excluding permeation of He) |
|
|
Allowable ambient temperature |
5–45℃ |
|
|
Allowable ambient humidity |
10–90% (No condensation allowed) |
|
|
Materials of parts in |
Body: SUS316 Sealing: FKM (option: CR or NBR) |
|
|
Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
|
|
Flow rate output signals |
0–5 VDC (External load resistance: 250 kΩ or more) |
|
|
Required power supply |
+15VDC (±5%) 100mA, −15VDC (±5%)100mA |
|
|
Joint (Main unit bore) |
Standard: 1/4SWL |
Standard: 3/8SWL |
|
Weight |
Approx. 800 g |
Approx. 1000 g |
|
Flow range (N2 equivalent, 20℃/1atm) |
10 SCCM–20 SLM (freely |
30 SLM–100 SLM (freely |
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us
Untuk informasi lebih lanjut silakan hubungi :
PT. Wiratama Mitra Abadi
Jl. Dewi Kunti II No. 2 Kalimalang - Bekasi
Kantor Cabang :
Perumnas Teluk Jambe Block C No. 53
Phone : 085 100 711 033, 085 105 062 090
Mobile : 6287780553773, 62812 8208 4779
Email : sales@wmablog.com
Website : www.flowmasonic.com
Blog : www.wmablog.com
Skype : Wiratama Mitra Abadi
WA : 081218618184