MODEL 3100 SERIES
The Model 3100 Series Mass Flow Meter is a new, ad-vanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.
Features
- Equipped with a temperature follow-up type current difference detection flow sensor to ensure high accuracy and quick response.
- Measurements of minute flows available up to 1 SCCM full scale (SR option).
Standard Spesifications
|
Flow range (at N2 calibration conditions) |
10SCCM-20SLM |
|
Response |
1 sec. or less to within ±2% of full scale of |
|
Accuracy |
Within ±1.0% F.S./3100 |
|
Linearity |
Within ±0.5% F.S. |
|
Repeatability |
Within ±0.2% F.S. |
|
Proof pressure |
980kPa |
|
Leak rate |
1x10-8 Pa·m3/s or less (excluding transmission of He) |
|
Working temperature range |
0-50℃ (Accuracy guarantee: 15-35℃) |
|
Materials of parts exposed to gases |
Body: SUS 316L, SUS 316, PTFE |
|
Joint |
Standard: 1/4SWL® |
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Optional: 1/8SWL® 1/4VCR® RC1/4®, etc. |
|
|
Electrical connections |
Dsub 9-pin male connector per KFC standard |
|
Flow rate output signals |
0-5VDC |
|
Required power supply* |
+15VDC (±5%) 100mA, –15VDC (±5%) 100mA |