MODEL 5400
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.
Features
- Control and response in each setting range are improved.
- The following capability to the set voltage is improved (supporting ramping specifications).
- As the valve is improved, the control resolution in each range is improved.
Standard Spesifications
|
Model
|
5400 |
5410 |
|
Flow range (N2 equivalent, |
10 SCCM–20 SLM |
10 SCCM–20 SLM |
|
Sensor |
Thermal mass flow sensor |
|
|
Valve type
|
Proportional solenoid valve (closed when not energized) |
- |
|
Control range |
2–100% (F.S.) |
- |
|
Response
|
1 sec. or less (0–100%
|
- |
|
Accuracy
|
±1% F.S. (20℃) |
|
|
Repeatability
|
Within ±0.2% F.S. (20℃) |
|
|
Operating differential
|
F.S. ≤ 5 SLM: 50–300 kPa F.S.> 5 SLM: 100–300 kPa |
- - |
|
Allowable operating |
300 kPa (G) or less |
|
|
Proof pressure |
980 kPa (G) |
|
|
Leak rate |
1 × 10-11 Pa·m3/s or less |
|
|
Allowable ambient |
0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃) |
|
|
Allowable ambient humidity |
10–90% (No condensation allowed) Body: SUS316L |
|
|
Materials of parts in |
Diaphragm: Ni-Co Valve seat: PTFE Sealing: SUS316L, Ni |
|
|
Electric connection
Flow rate input signals |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) 0–5 VDC (Input impedance: 1 MΩ or more) |
|
|
Flow rate output signals
|
0–5 VDC (Minimum load resistance: 250 kΩ or more) |
|
|
Required power supply |
+15 VDC (±5%) 100 mA, |
+15 VDC (±5%) 100 mA, |
|
Joint (Main unit bore) |
Standard: 1/4 VCR equivalent Option: 1/4 SWL |
|
|
Weight |
Approx. 1000 g |
Approx. 800 g |
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.