Mass Flow Controller MODEL Kofloc 3200 SERIES

Harga :

CALL

Merk :

KOFLOC

Pembelian Minimal :

1 unit

Pengiriman :

1 hari sejak pembayaran

Lokasi :

Jawa Barat - Bekasi

Dilihat :

109 Kali

Update Terakhir :

06-11-2017 13:38

Detail Produk

High-grade Mass Flow Controller

MODEL 3200 SERIES

Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manu-facture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high per-formance is equal to a new standard of KOFLOC.

Features

· Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accu-racy and high-speed response

· Use of a normally closed valve to ensure safety

· Reduced dead volume thanks to the diaphragm seat valve

· Control of small quantities of flows available up to 1 SCCM fullscale (SR option)

· Low differential pressure type control available for combustiblegases (LP option)

Standard Specifications

Flow range (N2 equivalent, 20℃/1 atm)	1 SCCM–20 SLM (The conditions are freely selectable)
Sensor	Thermal mass flow sensor
Valve type	Proportional solenoid valve (closed when not energized)
Control range	2–100% (F.S.)
Response	1 sec. or less (0–100% within ±2% typical)
Accuracy	±1% F.S. (Accuracy guaranteed at 15–35℃)
Repeatability	±0.2%F.S.
Operating differential pressure	F.S. ≤ 5 SLM: 50–300 kPa (G)
	F.S.> 5 SLM: 100–300 kPa (G)
	Option: Low differential pressure (LP) specification is avaible depending on conditions.
Allowable operating pressure	300 kPa (G) or less
Proof pressure	980 kPa (G)
Leak rate	1 × 10^-8 Pa·m³/s or less (excluding permeation of He)
Allowable ambient temperature	0–50℃
Allowable ambient humidity	10–90% (No condensation allowed)
Materials of parts in contact with gases	Body: SUS316L
	Diaphragm: SUS316
	Valve seat: FKM (option: CR, NBR or perfluor)
	Sealing: FKM (option: CR, NBR or perfluor)
Electric connection	Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals	0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals	0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply	+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore)	Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.
Weight	Approx. 1000 g

!!Note !!
Specifications relating to the flow range (e.g., flow range, accuracy and re-sponse) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Harnest Layout

Pin Assigment of Dsub 9-pin Connector per KFC Standard

Pin No	Signal	Pin No.	Signal
1	Input valve open/close operation	6	Flow input Hi
2	Flow output 0-5 V	7	Flow output COM
3	+15 VDC power source	8	Flow input Lo
4	Power source COM	9	NC
5	-15 VDC power source

Because a differential input system in used for the product, pin 4 (power source COM) and pin 7 (flow outpum COM) are connected inside the mass flow controller while pin 8 (flow input Lo) is isolated. In case of a single-ended connection , connect pin 8 to pin

Untuk informasi lebih lanjut silakan hubungi :

PT. Wiratama Mitra Abadi

Jl. Dewi Kunti II No. 2 Kalimalang - Bekasi
Kantor Cabang :
Perumnas Teluk Jambe Block C No. 53
Phone : 085 100 711 033, 085 105 062 090

Mobile : 6287780553773, 62812 8208 4779

Email : sales@wmablog.com
Website : www.flowmasonic.com
Blog : www.wmablog.com

Skype : Wiratama Mitra Abadi

WA : 081218618184

Flow Meter Wiratama

Mass Flow Controller MODEL Kofloc 3200 SERIES

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