MODEL 6610

This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the ac-

curacy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.

-High-precision regulation on the low-pressure side

High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.

- Non-grease specification

The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.

- Lock nut

The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.

- Non-bleed type

This non-bleed type valve prevents gas from leaking to the outside

-Gas chromatography

- High-purity gas control

- Low-pressure controllers

- Semiconductor industry