MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control.  The series  can  measure  gas  flow  in  a  pipe  diameter  as  small  as  3  mm,  but  not  over  19  mm.  With  the  self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.2FS)% or better depending on the requests.  The meters can work at an environment of -20 to 60 C  and  pressure  up  to  1.5  MPa. Applications  include  semiconductor  gas  process  monitoring  and  control, hospital oxygen gas monitoring, etc.